[PS-7-14] Highly Fabrication-Tolerant Shallow-Grating Coupler for Robust Coupling to Multimode "Optical Pin" ○J. Ushida1, M. Tokushima1, T. Uemura1, K. Kurata1 (1.PETRA(Japan)) https://doi.org/10.7567/SSDM.2015.PS-7-14