[PS-8-10] AlGaN Microdisks on Top of Supporting GaN Columns Fabricated using Hydrogen Environment Anisotropic Thermal Etching

^○S. Suzuki¹, T. Kouno¹, H. Takeshima¹, A. Kikuchi², K. Kishino², M. Sakai³, K. Hara¹ (1.Shizuoka Univ., 2.Sophia Univ., 3.Univ. of Yamanashi(Japan))

https://doi.org/10.7567/SSDM.2015.PS-8-10