[PS-8-21] Study on Microstructure of Gd₂O₃ and Nd₂O₃ Compound Film Formed by RF Magnetron Sputtering

^○Z. Wang¹, L. Xiao¹, J. Wang¹ (1.Tsinghua Univ.(China))

https://doi.org/10.7567/SSDM.2015.PS-8-21