[PS-8-7] N-face GaN (000-1) Films with Hillock-Free Smooth Surfaces Grown by Group-III-Source Flow-Rate Modulation Epitaxy

C. H. Lin¹, ^○T. Akasaka¹, H. Yamamoto¹ (1.NTT Corp.(Japan))

https://doi.org/10.7567/SSDM.2015.PS-8-7