[PS-9-12] Changes in Morphology and Local Conductance of GeTe-Sb₂Te₃ Superlattice Films on Silicon Made by Scanning Probe Microscopy in a Lithography Mode

^○L. Bolotov^1,2, T. Tada^1,2, Y. Saito^1,2, J. Tominaga^1,2 (1.AIST, 2.JST-CREST(Japan))

https://doi.org/10.7567/SSDM.2015.PS-9-12