The Japan Society of Applied Physics

[PS-9-3] Characterization of Epitaxial Calcium Fluoride as a Dielectric Material for Ultra-thin Barrier Layers in Silicon Microelectronics

Y. Y. Illarionov1,2, M. I. Vexler2, V. V. Fedorov2, S. M. Suturin2, N. S. Sokolov2, T. Grasser1 (1.TU Wien, 2.Ioffe Physical-Technical Inst.(Austria))

https://doi.org/10.7567/SSDM.2015.PS-9-3