Observation of Plastic and Elastic Deformations in Ge Films of Bonded GeOI

2015 International Conference on Solid State Devices and Materials

Sep 27, 2015 - Sep 30, 2015
Sapporo Convention Center, Sapporo, Japan

^○T. Nishimura¹, T. Nakamura¹, T. Yajima¹, A. Toriumi¹ (1.Univ. of Tokyo(Japan))