[PS-1-20L] New Structural Properties of Ferroelectric Y₂O₃-doped HfO₂ Films Probed by Microscopic Raman Spectroscopy Measurements

^○K. Izukashi^1,2, T. Nishimura^1,2, S. Migita^2,3, A. Toriumi^1,2 (1.Univ. of Tokyo, 2.AIST, 3.JST-CREST(Japan))