Improvement of Filter-less Fluorescence Sensor by the Surface Planarization of Polysilicon Photogate

Y. J. Choi

2015 International Conference on Solid State Devices and Materials

Sep 27, 2015 - Sep 30, 2015
Sapporo Convention Center, Sapporo, Japan

[PS-11-13L] Improvement of Filter-less Fluorescence Sensor by the Surface Planarization of Polysilicon Photogate

^○Y. J. Choi¹, K. Takahashi¹, M. Matsuda¹, T. Hizawa¹, Y. Moriwaki¹, F. Dasai¹, Y. Kimura¹, I. Akita¹, T. Iwata¹, M. Ishida¹, K. Sawada¹ (1.Toyohashi Univ. of Tech.(Japan))

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