Temperature-Lowered Plasma Treatment by Controlling Direction of Supplying Reactive Species for Biological Application

2015 International Conference on Solid State Devices and Materials

Sep 27, 2015 - Sep 30, 2015
Sapporo Convention Center, Sapporo, Japan

Y. Nakayama¹, ^○S. Kumagai¹, H. Hashizume², T. Ohta³, M. Ito³, M. Hori², M. Sasaki¹ (1.Toyota Tech. Inst., 2.Nagoya Univ., 3.Meijo Univ.(Japan))