2015 International Conference on Solid State Devices and Materials
Sep 27, 2015 - Sep 30, 2015 Sapporo Convention Center, Sapporo, Japan
[PS-13-14] XPS Study of HfO2 Growth on 2H-MoS2 Substrate
○C. P. Chen1, S. W. Ong2, J. W. Chai3, Z. Zhang3, S. J. Wang3, J. S. Pan3, E. S. Tok1,2 (1.National Univ. of Singapore, 2.Yale-NUS College, 3.Inst. of Material Res. and Eng.(Singapore))