Mapping of Si/SiC Hetero p-n Junctions Using Scanning Internal Photoemission Microscopy

2015 International Conference on Solid State Devices and Materials

Sep 27, 2015 - Sep 30, 2015
Sapporo Convention Center, Sapporo, Japan

^○M. Shingo¹, J. Liang², N. Shigekawa², M. Arai³, K. Shiojima¹ (1.Univ. of Fukui, 2.Osaka City Univ., 3.New Japan Radio Co., Ltd.(Japan))