[PS-14-14] Heteroepitaxial Growth of Diamond on 3C-SiC/Si Substrates by Antenna-Edge Microwave Plasma CVD

^○T. Suto¹, J. Yaita^1,2, T. Iwasaki^1,2,3, M. Natal⁴, S. E. Saddow⁴, M. Hatano^1,2,3 (1.Tokyo Tech, 2.JST-CREST, 3.JST-ALCA, 4.Univ. of South Florida(Japan))