A 150 A SiC VMOSFET with 6 x 6 mm<sup>2</sup> Chip Size on a 150 mm C-face in-house Epitaxial Wafer

2015 International Conference on Solid State Devices and Materials

Sep 27, 2015 - Sep 30, 2015
Sapporo Convention Center, Sapporo, Japan

^○Y. Saitoh¹, H. Itoh¹, K. Wada¹, M. Sakai¹, T. Horii¹, K. Hiratsuka¹, S. Tanaka¹, Y. Mikamura¹ (1.Sumitomo Electric Industries, Ltd.(Japan))