2015 International Conference on Solid State Devices and Materials
Sep 27, 2015 - Sep 30, 2015 Sapporo Convention Center, Sapporo, Japan
[PS-2-1] Mechanical Properties of Electrodeposited Gold for MEMS Device
○M. Yoshiba1,2, C. Y. Chen1,2, T. F. M. Chang1,2, D. Yamane1,2, K. Machida1,2,3, K. Masu1,2, M. Sone1,2 (1.Tokyo Tech, 2.JST-CREST, 3.NTT Adv. Tech. Corp.(Japan))
