Radio Frequency Characteristics in Tantalum Nitride Thin Film Resistor

2015 International Conference on Solid State Devices and Materials

Sep 27, 2015 - Sep 30, 2015
Sapporo Convention Center, Sapporo, Japan

^○S. H. Kwon¹, M. Nam¹, A. Kim¹, K. Kang¹, S. J. Chae¹, S. J. Lee¹, W. S. Sul², S. G. Pyo¹ (1.Chung-Ang Univ., 2.NNFC(Korea))