Low Current Collapsed AlGaN/GaN HEMT-on-Si Substrate with SiN<sub>x</sub> / HfO<sub>2</sub> Dual Passivation Layer

2015 International Conference on Solid State Devices and Materials

Sep 27, 2015 - Sep 30, 2015
Sapporo Convention Center, Sapporo, Japan

^○D. H. Kim¹, M. J. Kang¹, S. K. Eom¹, H. Y. Cha², K. S. Seo¹ (1.Seoul National Univ., 2.Hongik Univ.(Korea))