The Japan Society of Applied Physics

[PS-8-10] AlGaN Microdisks on Top of Supporting GaN Columns Fabricated using Hydrogen Environment Anisotropic Thermal Etching

S. Suzuki1, T. Kouno1, H. Takeshima1, A. Kikuchi2, K. Kishino2, M. Sakai3, K. Hara1 (1.Shizuoka Univ., 2.Sophia Univ., 3.Univ. of Yamanashi(Japan))