2015 International Conference on Solid State Devices and Materials

Sep 27, 2015 - Sep 30, 2015
Sapporo Convention Center, Sapporo, Japan

[PS-8-21] Study on Microstructure of Gd₂O₃ and Nd₂O₃ Compound Film Formed by RF Magnetron Sputtering

^○Z. Wang¹, L. Xiao¹, J. Wang¹ (1.Tsinghua Univ.(China))

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