The Japan Society of Applied Physics

[G-3-4] Selective Epitaxy of Ge on Nano-tip Patterned Si (001): Towards Defect-free Ge Islands

G. Niu1, G. Capellini1,2, T. Niermann3, M. Salvalaglio4, A. Marzegalli4, M. A. Schubert1, P. Zaumseil1, H. M. Krause1, O. Skibitzki1, M. Lehmann3, F. Montalenti4, Y. H. Xie5, SchroederT. 1,6 (1.IHP, 2.Univ. Roma Tre, 3.Tech. Univ. Berlin, 4.Univ. degli Studi di Milano-Bicocca, 5.UCLA, 6.BTU Cottbus-Senftenberg(Germany))

2015 International Conference on Solid State Devices and Materials |Tue. Sep 29, 2015 9:45 AM - 10:00 AM |PDF Download

[G-4-4] Influence of Precursor Gas on SiGe Epitaxial Material Quality in Terms of Structural and Electrical Defects

S. Ike1,2,3, E. Simoen3, Y. Shimura3,4,5, A. Hikavyy3, W. Vandervorst3,4, R. Loo3, W. Takeuchi1, O. Nakatsuka1, S. Zaima1,6 (1.Graduate School of Eng., Nagoya Univ., 2.Research Fellow of JSPS, 3.Imec, 4.KU Leuven, 5.FWO Pegasus Marie Curie Fellow, 6.EcoTopia Sci. Inst., Nagoya Univ.(Japan))

2015 International Conference on Solid State Devices and Materials |Tue. Sep 29, 2015 4:40 PM - 4:55 PM |PDF Download