4:25 PM - 4:40 PM

[D-2-03] Crystallization and Activationof P⁺ dope a-Ge film by Atmospheric Pressure Micro-Thermal-Plasma-Jet

^○H. Harada¹, R. Shin¹, H. Hanafusa¹, S. Higashi¹ (1.Hiroshima Univ.(Japan))

https://doi.org/10.7567/SSDM.2016.D-2-03