The Japan Society of Applied Physics

10:30 AM - 10:45 AM

[D-5-04] Thickness-Controlled Low-Temperature (~380℃) Solid-Phase Crystallization of Sn-Doped Poly-Ge/Insulator for High Carrier Mobility (~320 cm2/Vs)

K. Moto1, T. Sadoh1, Y. Kai1, R. Matsumura1, M. Miyao1 (1.Kyushu Univ.(Japan))

https://doi.org/10.7567/SSDM.2016.D-5-04