10:00 〜 10:15

[E-3-02] Oxidation Induced Stress in the SiO₂/SiC System

^○X. Li¹, A. Ermakov¹, V. Amarasinghe¹, T. Gustafsson¹, L. C. Feldman¹, E. Garfunkel¹ (1.Rutgers Univ.(USA))

https://doi.org/10.7567/SSDM.2016.E-3-02