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[E-3-02] Oxidation Induced Stress in the SiO₂/SiC System

^○X. Li¹, A. Ermakov¹, V. Amarasinghe¹, T. Gustafsson¹, L. C. Feldman¹, E. Garfunkel¹ (1.Rutgers Univ.(USA))

https://doi.org/10.7567/SSDM.2016.E-3-02