11:15 AM - 11:30 AM

[G-6-01] Effect of Anti-Reflection Coating on the Crystallization of Amorphous Silicon Films by Flash Lamp Annealing

^○Y. Sonoda¹, K. Ohdaira¹ (1.JAIST(Japan))

https://doi.org/10.7567/SSDM.2016.G-6-01