10:45 〜 11:00

[H-5-05(Late News)] Development of Si Neural Probe with Piezoresistive Force Sensor for Insertion Force Monitoring

^○T. Harashima¹, T. Morikawa¹, H. Kino¹, T. Fukushima¹, T. Tanaka¹ (1.Tohoku Univ.(Japan))

https://doi.org/10.7567/SSDM.2016.H-5-05L