The Japan Society of Applied Physics

10:45 AM - 11:00 AM

[H-5-05(Late News)] Development of Si Neural Probe with Piezoresistive Force Sensor for Insertion Force Monitoring

T. Harashima1, T. Morikawa1, H. Kino1, T. Fukushima1, T. Tanaka1 (1.Tohoku Univ.(Japan))

https://doi.org/10.7567/SSDM.2016.H-5-05L