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[J-4-02] Light-Induced Degradation of SiN_x:H Capped Metal Oxide Stacked Passivation

^○H. Lee¹, T. Kamioka¹, Y. Ohshita¹ (1.Toyota Tech. Inst.(Japan))

https://doi.org/10.7567/SSDM.2016.J-4-02