10:00 AM - 10:20 AM

[K-3-02] Large Scale Integration of Silicon Nanomechanical Resonators above Industrial CMOS Wafers

W. Ludurczak¹,^○G. Gourlat¹, M. Gély¹, G. Billiot¹, J. Philippe¹, P. Villard¹, G. Sicard¹, T. Ernst¹, S. Hentz¹ (1.CEA-LETI(France))

https://doi.org/10.7567/SSDM.2016.K-3-02