10:40 〜 11:00

[K-3-04] Thermal Change in Resonance Wavelength of Si Resonator Sensors on Si on Insulator Substrate and Solution by Differential Operation

^○A. K. Sana¹, S. Yokoyama¹, Y. Nakashima¹, Y. Amemiya¹, S. Yokoyama¹ (1.Hiroshima Univ.(Japan))

https://doi.org/10.7567/SSDM.2016.K-3-04