14:00 〜 14:15
[N-1-02] Contact resistivity to C-doped (In)GaAsSb with Ti/Pt/Au and Pt/Ti/Pt/Au
○T. Hoshi1, N. Kashio2, Y. Shiratori1, H. Sugiyama1, K. Kurishima1, M. Ida1, H. Matsuzaki1
(1.NTT Device Tech. Labs.(Japan), 2.NTT Device Innovation Center(Japan))
https://doi.org/10.7567/SSDM.2016.N-1-02