5:25 PM - 5:40 PM

[N-2-06] 2-Dimentional Characterization of 3C-SiC Layers Using Scanning Internal Photoemission Microscopy

^○K. Shiojima¹, M. Shingo¹, N. Ichikawa², M. Kato² (1.Univ. of Fukui(Japan), 2.Nagoya Inst. of Tech.(Japan))

https://doi.org/10.7567/SSDM.2016.N-2-06