14:20 〜 14:40

[O-1-03] Design of Al₂O₃/SiO₂ Laminated Stacks with Mutiple Interface Dipole Layers to Induce Large Flatband Voltage Shifts of MOS Capacitors

^○H. Kamata¹, K. Kita¹ (1.Univ. of Tokyo(Japan))

https://doi.org/10.7567/SSDM.2016.O-1-03