The Japan Society of Applied Physics

3:00 PM - 3:20 PM

[O-1-05] Study on Dipole Layer Formation and its Origin at Al2O3/AlFxOy and Al2O3/AlNxOy Multi-anion Dielectric Interfaces by considering Anion Areal Density and Valence Differences

J. Fei1, R. Kunugi2, T. Watanabe2, K. Kita1 (1.Univ. of Tokyo(Japan), 2.Waseda Univ.(Japan))

https://doi.org/10.7567/SSDM.2016.O-1-05