15:00 〜 15:20

[O-1-05] Study on Dipole Layer Formation and its Origin at Al₂O₃/AlF_xO_y and Al₂O₃/AlN_xO_y Multi-anion Dielectric Interfaces by considering Anion Areal Density and Valence Differences

^○J. Fei¹, R. Kunugi², T. Watanabe², K. Kita¹ (1.Univ. of Tokyo(Japan), 2.Waseda Univ.(Japan))

https://doi.org/10.7567/SSDM.2016.O-1-05