13:30 〜 13:50

[O-4-01] Opportunity of Ferroelectric Phase Formation in Nitrogen-doped HfO₂

^○L. Xu¹, T. Nishimura¹, S. Shibayama¹, T. Yajima¹, S. Migita², A. Toriumi¹ (1.Univ. of Tokyo(Japan), 2.AIST(Japan))

https://doi.org/10.7567/SSDM.2016.O-4-01