14:30 〜 14:50

[O-4-04] Depolarization Process in Ferroelectric HfO₂ Probed by Piezo-response Force Microscopy (PFM)

^○S. Shibayama^1,2, L. Xu¹, X. Tian¹, S. Migita³, A. Toriumi¹ (1.Univ. of Tokyo(Japan), 2.JSPS(Japan), 3.AIST(Japan))

https://doi.org/10.7567/SSDM.2016.O-4-04