09:50 〜 10:10

[O-5-02] Advanced Layer Transfer Technology for Ultra Thin Body Ge on Insulator

^○T. Maeda¹, W. Chang¹, T. Irisawa¹, H. Ishii¹, H. Hattori¹, V. Pobortchii¹, Y. Kurashima¹, H. Takagi¹, N. Uchida¹ (1.AIST(Japan))

https://doi.org/10.7567/SSDM.2016.O-5-02