The Japan Society of Applied Physics

11:15 〜 11:45

[O-6-01(Invited)] Ultra-thin Dielectric Insertions for Contact Resistivity Lowering in Advanced CMOS: Promise and Challenges

L. Hutin1, J. Borrel1,2, Y. Morand2, F. Nemouchi1, M. Vinet1 (1.CEA-LETI(France), 2.STMicroelectronics(France))

https://doi.org/10.7567/SSDM.2016.O-6-01