12:25 〜 12:40

[O-6-04(Late News)] Achievement of Ultralow Contact Resistivity of Metal/Ge Contacts with Zr-N-Ge Amorphous Interlayer

^○H. Okamoto¹, K. Yamamoto¹, D. Wang¹, H. Nakashima¹ (1.Kyushu Univ.(Japan))

https://doi.org/10.7567/SSDM.2016.O-6-04L