The Japan Society of Applied Physics

15:00 〜 17:00

[PS-13-06] Centimeter-scale High-performance Few-layer MoS2 Fabricated by RF Magnetron Sputtering and Subsequent Post-deposition Annealing

S. Ishihara1,3, Y. Hibino1, N. Sawamoto1, T. Ohashi2, K. Matsuura2, H. Wakabayashi2, A. Ogura1 (1.Meiji Univ.(Japan), 2.Tokyo Tech(Japan), 3.Research Fellow of JSPS(Japan))

https://doi.org/10.7567/SSDM.2016.PS-13-06