2016 International Conference on Solid State Devices and Materials

Sep 26, 2016 - Sep 29, 2016
Tsukuba International Congress Center, Tsukuba, Japan

11:09 AM - 11:12 AM

[PS-13-04] High-Mobility and Low-Carrier-Density Sputtered-MoS₂ Film by Low-Temperature Forming-Gas Annealing for 3D-IC

^○J. Shimizu¹, T. Ohashi¹, K. Matsuura¹, I. Muneta¹, K. Kakushima¹, K. Tsutsui¹, H. Wakabayashi¹ (1.Tokyo Tech(Japan))

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