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[PS-14-09] Oxidation Mechanism of 4H-SiC in Dilute N₂O Ambient

T. H. Wu¹,^○B. Y. Tsui¹, Y. H. Tseng¹, C. T. Yeng², C. C. Hung², C. Y. Lee² (1.NCTU(Taiwan), 2.Hestia-Power Inc.(Taiwan))

https://doi.org/10.7567/SSDM.2016.PS-14-09