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[PS-14-10] Enhanced Thermal Oxidation of 4H-SiC Using SrTi_1-xMg_xO_3-δ Catalyst

^○L. Li¹, A. Ikeda¹, T. Asano¹ (1.Kyushu Univ.(Japan))

https://doi.org/10.7567/SSDM.2016.PS-14-10