The Japan Society of Applied Physics

15:00 〜 17:00

[PS-14-14(Late News)] Impact of Optical Phonon Scattering on Inversion Channel Mobility in 4-H-SiC Trenched MOSFETs

K. Kutsuki1,2, S. Kawaji1, Y. Watanabe1, T. Onishi2, H. Fujiwara2, K. Yamamoto3, T. Yamamoto3 (1.Toyota Central R&D Labs. Inc.(Japan), 2.TOYOTA MOTOR Corp.(Japan), 3.DENSO Corp.(Japan))

https://doi.org/10.7567/SSDM.2016.PS-14-14L