The Japan Society of Applied Physics

15:00 〜 17:00

[PS-14-15(Late News)] Strong Impact of Slight Misalignment of the Trench Direction from [11-20] on Deep Trench Filling Epitaxy for SiC Super-junction (SJ) Devices

R. Kosugi1, S. Ji1, K. Mochizuki1, H. Kouketsu1, Y. Kawada1, H. Fujisawa1, K. Kojima1, S. Yoshida1, Y. Yonezawa1, H. Okumura1 (1.AIST(Japan))

https://doi.org/10.7567/SSDM.2016.PS-14-15L