Strong Impact of Slight Misalignment of the Trench Direction from [11-20] on Deep Trench Filling Epitaxy for SiC Super-junction (SJ) Devices

15:00 〜 17:00

[PS-14-15(Late News)] Strong Impact of Slight Misalignment of the Trench Direction from [11-20] on Deep Trench Filling Epitaxy for SiC Super-junction (SJ) Devices

^○R. Kosugi¹, S. Ji¹, K. Mochizuki¹, H. Kouketsu¹, Y. Kawada¹, H. Fujisawa¹, K. Kojima¹, S. Yoshida¹, Y. Yonezawa¹, H. Okumura¹ (1.AIST(Japan))