3:00 PM - 5:00 PM

[PS-14-15(Late News)] Strong Impact of Slight Misalignment of the Trench Direction from [11-20] on Deep Trench Filling Epitaxy for SiC Super-junction (SJ) Devices

^○R. Kosugi¹, S. Ji¹, K. Mochizuki¹, H. Kouketsu¹, Y. Kawada¹, H. Fujisawa¹, K. Kojima¹, S. Yoshida¹, Y. Yonezawa¹, H. Okumura¹ (1.AIST(Japan))

https://doi.org/10.7567/SSDM.2016.PS-14-15L