11:24 AM - 11:27 AM

[PS-14-09] Oxidation Mechanism of 4H-SiC in Dilute N₂O Ambient

T. H. Wu¹,^○B. Y. Tsui¹, Y. H. Tseng¹, C. T. Yeng², C. C. Hung², C. Y. Lee² (1.NCTU(Taiwan), 2.Hestia-Power Inc.(Taiwan))