2016 International Conference on Solid State Devices and Materials
Sep 26, 2016 - Sep 29, 2016 Tsukuba International Congress Center, Tsukuba, Japan
11:42 AM - 11:45 AM
[PS-14-15(Late News)] Strong Impact of Slight Misalignment of the Trench Direction from [11-20] on Deep Trench Filling Epitaxy for SiC Super-junction (SJ) Devices
○R. Kosugi1, S. Ji1, K. Mochizuki1, H. Kouketsu1, Y. Kawada1, H. Fujisawa1, K. Kojima1, S. Yoshida1, Y. Yonezawa1, H. Okumura1 (1.AIST(Japan))
