11:00 AM - 11:03 AM

[PS-1-01] Structural and Electrical Characterization of Epitaxial Ge Thin Film on Si (001) Formed by Sputtering

^○S. Otsuka¹, T. Mori¹, Y. Morita¹, N. Uchida¹, Y. Liu¹, S. O’uchi¹, H. Fuketa¹, S. Migita¹, M. Masahara¹, T. Matsukawa¹ (1.AIST(Japan))